Intelligent OPC Engineer Assistant for Semiconductor Manufacturing
Why we need / what is recipe
From hand-written recipe to the LLM generated recipe.
Two stage agent-framework:
- Stage 1: RL generate the best data point.
- Stage 2: Use Multi-modal LLM to do feature generation and feature labeling.
- Then to decision tree-based regression.
- Generate the final recipe based on the generated decision tree.
Prompt example.
